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Furnace tube Cleaning Equipment (EPI Cleaner)
Key words:
Furnace tube Cleaning Equipment (EPI Cleaner)
Category:
Furnace tube cleaning equipment
Product accessories:
Hotline:
Furnace tube Cleaning Equipment (EPI Cleaner)
Device functions and information overview:
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Overall dimension |
L*W*H(unit mm)=3600×1900×2900mm (according to different cleaning specifications) |
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Equipment weight |
2700Kg (depending on different cleaning specifications) |
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Equipment characteristics |
1. Maximum load of mechanical arm: 25 kg 2, cleaning object: irregular quartz products maximum dimensions: 750L*500W*400Hmm 3, equipment composition: mechanical arm, HN slot, HF slot, QDR slot and other mechanisms 4, equipment safety: acid discharge permission classification, acid discharge pop-up window confirmation, door lock Interlock, EMO, etc 5, the main functions of the acid tank: automatic replenishment, automatic tank cover, liquid circulation filtration, independent sampling port 6, the process automatic processing, can be preset multiple recipes, simple operation 7, Optional SECS/GEM interface |
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Cleaning form |
Cleaning form: The left side is the electric control area, the right side is the process cleaning area, the top is equipped with a movable bearing mechanical arm, the bottom is equipped with a universal caster and a fixed foot cup |
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Control form |
PLC+ touch screen control (one-click operation), multiple recipes can be preset, simple operation (optional SECS/GEM interface) |
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Safety performance |
Slot cover position detection, safety door interlock, leakage detection, etc |
|
Applicable material |
Quartz, silicon carbide |
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Applicable technology |
Quartz ring/boat, quartz plate and other parts immersion cleaning |
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